The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 1994
Filed:
May. 27, 1993
Applicant:
Inventors:
John W Steele, Chandler, AZ (US);
Cliff Stein, Gilbert, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 80 ; 437106 ; 437131 ; 437108 ;
Abstract
A non-strained epitaxial layer is formed to have a small transition width and a low amount or no amount of oxygen incorporated therein. During the formation of non-strained epitaxial layer, a germanium source gas is introduced. Germanium reacts with water and/or oxygen to form GeO, which sublimates from the surface of the non-strained epitaxial layer, instead of oxygen being incorporated into the lattice. Thus, a low temperature epitaxial process can be used to obtain the small transition width without having oxygen incorporated into the non-strained epitaxial layer.