The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 1994
Filed:
Jan. 11, 1994
Applicant:
Inventors:
David E Bornside, Arlington, MA (US);
Robert A Brown, Winchester, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427240 ; 118 52 ;
Abstract
An apparatus and method is provided for spin coating films on a surface. The apparatus includes a chamber capable of being closed to the atmosphere, a spinnable member within the chamber capable of supporting the surface and a pump capable of reducing the pressure within the chamber. The method includes depositing a liquid on the surface, reducing the pressure in the vicinity of the surface and spinning the surface.