The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 1994
Filed:
Dec. 20, 1993
Michael B Cain, Corning, NY (US);
Michael S Dobbins, Corning, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
Disclosed is a method and apparatus for providing reactant vapors to a utilization site. The apparatus includes a vaporization chamber enclosed by top and bottom walls, side walls and first and second end walls. The first end wall is elevated with respect to the second end wall. The reactant is supplied in liquid form to a flow distributor that delivers the liquid to that portion of the bottom wall near the first end wall. The angle with which the bottom wall is inclined with respect to horizontal is sufficient to cause the liquid to flow down the bottom wall at a rate sufficient to form a film, the thickness of which is smaller than that thickness which would support a bubble during heating of the film. The surface is heated to a temperature greater than the boiling point of the liquid, thereby converting the liquid reactant to a vapor that is delivered to the vapor utilization site.