The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1994
Filed:
Feb. 02, 1994
Toshio Hirokawa, Kawasaki, JP;
Norio Uchida, Yokohama, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
Disclosed is an X-ray exposure apparatus comprising a chamber, filled with X-ray low attenuation gas for guiding X-rays, generated from an X-ray source, to an X-ray window, a gas supplying portion, provided to supply X-ray low attenuation gas into the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, a gas discharging portion, provided to discharge gas from the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, and a flow-rate controller for controlling a flow rate of the gas to be supplied to the gas supplying portion to thereby control pressure in the chamber, whereby pressure in the chamber is made equal to or slightly higher than atmospheric pressure by setting the small-diameter portion of the gas supplying portion smaller than that of the gas discharging portion.