The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1994
Filed:
Sep. 20, 1993
Fumitoshi Yasuo, Ayama, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
In an electron spectroscopy analyzer for obtaining an electron spectroscopy spectrum by applying to a sample an X-ray or electron beam from a first beam source and by analyzing the energy of secondary electrons emitted from the sample, an amount of energy shift of a reflected beam from the sample is obtained by applying a charging beam from second beam source, and a shift of the electron spectroscopy spectrum is corrected in accordance with the amount of energy shift. With this structure, a shift of a spectral line due to charges on the sample surface caused by the application of the X-ray or electron beam is corrected, thereby improving accuracy of the measurement of values and intensity of energy.