The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1994
Filed:
Sep. 02, 1993
Applicant:
Inventor:
Henry W Chung, Cupertino, CA (US);
Assignee:
National Semiconductor Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 52 ; 437 47 ; 437 60 ; 437192 ; 437919 ;
Abstract
A self-aligned thin-film ceramic oxide stacked capacitor on an underlying semiconductor substrate using a spin-on ceramic oxide fabricated by forming conductive pillars and the lower electrode, forming a temporary layer, building up the semiconductor substrate around the temporary layer, removing the temporary layer, and then spinning on the ceramic oxide. This results in a ceramic oxide stacked capacitor with the conformal thin-film ceramic oxide encapsulated by the top electrode.