The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1994
Filed:
Aug. 31, 1992
Applicant:
Inventors:
Keith A Klinedinst, Marlborough, MA (US);
Joseph E Lester, Lincoln, MA (US);
Assignee:
GTE Products Corporation, Danvers, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
4272481 ; 427585 ;
Abstract
An apparatus and method for the low temperature deposition of SiO.sub.2 in a low pressure chemical vapor deposition system is disclosed. The apparatus makes use of a prereactor to form an activated form of diacetoxyditertiarybutoxysilane (DADBS) from which SiO.sub.2 is deposited. The prereactor may be positioned upstream of an SiO.sub.2 deposition reactor or may be incorporated into the front end thereof.