The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1994
Filed:
Aug. 28, 1992
Joseph F Vollaro, Pleasantville, NY (US);
Hughes Aircraft Company, Los Angeles, CA (US);
Abstract
An apparatus (40) for providing consistent, non-jamming registration of a semiconductor wafer (46) undergoing process work includes a plate (42) upon which the wafer (46) is laid flat. A flat (45) of the wafer (46) is registered against two rollers (43') that are fixedly mounted to the plate (42). A third roller (43), also fixedly mounted to the plate (42), registers a first point (47) along the circumference of the wafer (46). A fourth roller (48) is fixedly mounted to a bracket (50) that is movable approximately along the radius of the wafer (46). A force (54) is applied to this bracket (50) resulting in the fourth roller (48) applying a force against the wafer (46). This resultant force, coupled with the rotating capability of the rollers (43, 43', 48), allows the wafer (46) to rotate into a proper registration position. A second embodiment (60) that incorporates essentially these same force and rotation dynamics through the use of flexures (64, 66, 68) is also disclosed.