The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 1994

Filed:

Jul. 24, 1992
Applicant:
Inventors:

Shigeki Tsuchitani, Mito, JP;

Seiko Suzuki, Hitachioota, JP;

Masayuki Miki, Katsuta, JP;

Masahiro Matsumoto, Hitachi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
2807 / ;
Abstract

In a capacitance type accelerometer used for an air bag system etc., a plurality of grooves crossing each other are provided on the surface of a movable electrode which is arranged to face a fixed electrode at a portion having a gap thereinbetween, and end portions of each groove open to an outside space at the portion between the movable electrode and the fixed electrode. The grooves can be provided on surface of the fixed electrodes. Ventilation between inside and outside of the facing portion is improved by opening of the grooves to outside space, and air damping which is caused at operation of the movable electrode at the gap between the electrodes is reduced, and, consequently, response speed of the movable electrode is increased.


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