The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1994
Filed:
Jun. 07, 1993
Applicant:
Inventors:
Seshu B Desu, Blackburg, VA (US);
May Nyman, Albuquerque, NM (US);
Pradyot A Agaskar, Lawrenceville, NJ (US);
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01G / ;
U.S. Cl.
CPC ...
2041574 ; 20415742 ; 20415762 ; 20415793 ; 556 40 ; 556 81 ;
Abstract
A method and apparatus for the synthesis of .beta.-diketonates such as Pb(fod).sub.2 and Pb(thd).sub.2 for use as precursors in metalorganic chemical vapor deposition processes. Lead oxide and a medium of pentane and a protonated ligand (H-fod or H-thd) are combined in a flask and subjected to reaction-promoting ultrasonic waves. The flask is immersed in a water bath to maintain a constant cool temperature, and the flask may include one or more arms for cooling and circulation of the medium during the reaction.