The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 1994
Filed:
Apr. 11, 1991
Applicant:
Inventors:
Mizuaki Suzuki, Tokyo, JP;
Matsuo Kishi, Tokyo, JP;
Assignee:
Seiko Instruments Inc., , JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
1187 / ; 118726 ; 21912115 ; 21912127 ; 21912129 ;
Abstract
An apparatus for forming a thin film irradiates an electron beam on a vaporizable substance held in a crucible. A pair of electromagnets are disposed in coplanar relation and at right angles to each other to generate a magnetic field which deflects the electron beam. An alternating current is applied to the electromagnets to generate the magnetic field, and the magnitude and frequency of the current are controlled so as to scan the electron beam in a circular pattern on the vaporizable substance.
Suzuki, Mizuaki. (1994). Apparatus for forming a thin film (U.S. Patent No. 5346554). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5346554
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile