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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5345534 B1

PDFFull Text
Date of Patent:
Sep. 06, 1994

Filed:

Mar. 29, 1993

Semiconductor wafer heater with infrared lamp module with light blocking

Applicant:
Inventors:

Habib N Najm, Dallas, TX (US);

Steve S Huang, Richardson, TX (US);

Cecil J Davis, Greenville, TX (US);

Robert T Matthews, Plano, TX (US);

Assignee:

Texas Instruments Incorporated, Dallas, TX (US);

Attorneys:

Valetti; Mark A.

Brady; Wade J.

Donaldson; Richard L.

Primary Examiner:

Bruce A Reynolds

Assistant Examiner:

John A Jeffery

Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
392422 ; 392316 ; 118724 ;
Abstract

A thin reflective cylindrical baffle [20] in a radiant lamp heater is provided in the space below a plurality of heating bulbs [2,4,6] (arranged in a center position and around a middle and outer ring) and above a quartz window [12]. The baffle diameter is such that it fits within the annular space between the middle [4] and outer [6]ring of bulbs. The baffle which blocks a predetermined amount of light generated by the lamp bulbs [20] allows improved controllability of wafer temperature profile--for a wafer heated by a radiant lamp heater.

Find Patent Forward Citations

Najm, Habib. (1994). Semiconductor wafer heater with infrared lamp module with light blocking (U.S. Patent No. 5345534). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5345534

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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