The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 1994

Filed:

Aug. 25, 1992
Applicant:
Inventors:

Tsutomu Itoh, Tokyo, JP;

Shinji Fukami, Tokorozawa, JP;

Masayuki Kitoh, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
239 13 ; 239 79 ; 239 81 ; 21912147 ; 219 7616 ; 427446 ;
Abstract

A plasma flame flowing to a substrate around a beam of melt droplets is trimmed by spraying a refrigerant on the periphery of the plasma flame in the direction which allows the refrigerant to contact with the beam of the melt droplets.


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