The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 1994
Filed:
Mar. 22, 1993
Applicant:
Inventor:
Wolfgang Benecke, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310307 ; 310331 ; 310332 ;
Abstract
A micromanipulator suited for use in vacuum and microscopic systems is prded for moving objects permitting variable step spans up to approximately 100 .mu.m while having high precision of movement and a high degree of miniaturization. The micromanipulator is equipped with bimaterial tongues which can be positioned with the aid of heating and sensor elements. The object carrier is moved by suitable coordination of the tongue movements. The micromanipulator permits any desired movements in a plane and rotary and tilting movements of the object carrier.