The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 1994
Filed:
Jan. 04, 1993
Applicant:
Inventors:
N David Theodore, Mesa, AZ (US);
Juan P Carrejo, Tempe, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 250307 ;
Abstract
The topography of a surface is measured by utilizing a probe (10, 20) having a variable flexibility and a conductive tip (14, 16). Using the conductive tip (14, 16), a first tunneling current is measured at a first point (36). The tip (14, 16) is moved to a second point (37) and a deflection force is measured. The measurements from the different points (36, 37, 38, 39, 40, 41) are combined to provide composite images of the surface's topography and material composition.