The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 1994
Filed:
Apr. 19, 1993
Applicant:
Inventor:
Kazuhiko Itoh, Tokyo, JP;
Assignee:
Japan Aviation Electronics Industry Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250310 ; 250397 ;
Abstract
An electron beam emitted from an electron gun is applied to an object whose crystal structure is being examined in a vacuum, and electron beams diffracted by the object are introduced into an energy discriminator of an energy analyzer which discriminates an electron beam or beams having a predetermined energy. The thus discriminated electron beams is converted by an electron beam detector into an electric signal for measuring the diffracted electron beam intensity.