The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 1994
Filed:
Sep. 27, 1993
Applicant:
Inventors:
Andre Baldy, Seyssins, FR;
Gerard Barrois, Le Fontanil, FR;
Henri Blanc, Saint Julien de Ratz, FR;
Marcel Dominiak, Grenoble, FR;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
B24B / ; B24B / ;
U.S. Cl.
CPC ...
51 67 ; 51 62 ; 5128 / ;
Abstract
A polishing machine having a taut microabrasive sheet. The machine includes a machine polishing disk in the form of a planar reference disk and a microabrasive sheet held taut on the disk by an appropriate mechanism. The mechanism for holding the microabrasive sheet taut can be a delivery roll and a receiving roll. The machine can be applied to the polishing of silicon wafers containing integrated components and in particular magnetic read-write heads.