The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 1994
Filed:
Sep. 28, 1992
Applicant:
Inventors:
Masaru Nakayama, Atsugi, JP;
Osamu Takamatsu, Atsugi, JP;
Takayuki Yagi, Machida, JP;
Keisuke Yamamoto, Yamato, JP;
Takehiko Kawasaki, Isehara, JP;
Yasuhiro Shimada, Atsugi, JP;
Yoshio Suzuki, Atsugi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 250307 ;
Abstract
A probe drive mechanism includes a cantilever portion in which a piezoelectric layer is disposed between electrode layers, and a circuit portion which is positioned adjacent to the cantilever portion and drives the cantilever. The cantilever portion and the circuit portion are formed on the same substrate. A protection layer covers the circuit portion and part of the substrate, and the cantilever portion is formed on the protection layer adjacent to the circuit portion.