The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 1994
Filed:
Jul. 07, 1992
Robert E Steere, III, Boonton, NJ (US);
Thomas E Leonard, Vernon, CT (US);
Silicon Technology Corp., Oakland, NJ (US);
Abstract
A seal assembly for a wafer grinding machine is mounted on a housing in which a grinding wheel is contained. The seal assembly is formed of a pair of flexible strips which are secured over an opening in a plate mounted on a housing enclosing the grinding wheel for sealingly engaging a respective planar surface of a wafer which is introduced through the opening by a rotatable chuck. The edges of the sealing strips define a V-shaped gap to ensure that the edges are disposed in biased relation against each other and against a wafer which passes between the strips. A tube provided with perforations is disposed to blow air to clear debris from the wafer.