The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 1994
Filed:
Sep. 23, 1991
Applicant:
Inventors:
Stephen Semancik, Mount Airy, MD (US);
Richard E Cavicchi, Washington Grove, MD (US);
Assignee:
The United States of America, as represented by the Secretary of Commerce, Washington, DC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B / ;
U.S. Cl.
CPC ...
428701 ; 73 3106 ; 428216 ; 428336 ; 428469 ; 428472 ; 428702 ;
Abstract
A planar epitaxial film of tin oxide has low defect density, high purity, crystalline rutile unit cell structure, one crystalline orientation, controlled stoichiometry, extended lateral dimensions, extremely smooth surface morphology, a high degree of atomic order extending to the surface of the film and is colorless and transparent. The film is made by a method which includes reactive sputter deposition. The films can be used in chemical sensors as well as in numerous other applications.