The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 1994
Filed:
May. 19, 1993
Thomas E Jones, Spring Valley, CA (US);
Wayne C McGinnis, San Diego, CA (US);
J Scott Briggs, Carlsbad, CA (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A compact heater is designed for the deposition of thin films at high temperatures in an oxidizing atmosphere or in vacuum. The heater is designed to accommodate a small-diameter load-lock system in an ultra-high-vacuum deposition chamber, and can operate in 0 to 1 atmosphere of oxygen up to at least 800.degree. C. The compact design allows the heater, including a substantially isothermal substrate holder having the substrate affixed thereto, included temperature sensor and attached main body portion, to be loaded through a load-lock port with about a 2.5 inch inside diameter. Heat is generated resistively, and the substrates are heated directly by thermal conduction. The heater was designed specifically to heat substrates to precisely monitored temperatures during the growth of high-temperature superconducting thin films.