The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 1994
Filed:
Oct. 05, 1992
Applicant:
Inventor:
Satoshi Hikida, Nara, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 31 ; 437154 ; 437164 ; 257552 ;
Abstract
A silicon oxide film is formed at a surface of a silicon substrate of a first conductive type, and then patterned to have an opening. PSG is deposited on the silicon substrate having the insulating film thereon, and then etched to leave the PSG only on a side wall of the opening. An impurity is implanted to the silicon substrate through the opening, and then thermal treatment is effected.