The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1994
Filed:
Mar. 02, 1993
Applicant:
Inventors:
Gerard Van Engelen, Eindhoven, NL;
Adrianus G Bouwer, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B / ;
U.S. Cl.
CPC ...
318640 ; 318653 ; 318 38 ;
Abstract
A positioning device includes a table (5, 69), which is displaceable in two coordinate directions (X, Y) by means of Lorentz forces of electric linear motors over a base (3) and is guided over the base (3) by means of a static gas bearing, which has an air gap thickness independent of the coil systems and magnet systems (15-21, 37-43) in the motors. The positioning device is particularly suitable for the manufacture of masks with patterns for integrated circuits.