The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1994
Filed:
Jun. 03, 1992
Applicant:
Inventor:
Toshiro Tsumori, Kanagawa, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430321 ; 427162 ; 430323 ; 430324 ; 430330 ; 430394 ;
Abstract
A method of forming a microlens made of a thermoplastic resin on a solid-state imaging device, including the steps of forming a resist pattern having an opening as a microlens forming portion on the solid-state imaging device; filling the opening with the thermoplastic resin; removing the resist pattern; and thermally deforming the thermoplastic resin on the opening. Accordingly, a microlens having a desired shape can be formed with a fine lens pattern of 0.5 .mu.m or less uniformly and highly accurately.