The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1994
Filed:
May. 12, 1992
Applicant:
Inventors:
Clifford D Fung, Mansfield, MA (US);
Kevin H-L. Chau, Franklin, MA (US);
Assignee:
The Foxboro Company, Foxboro, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ; G01L / ;
U.S. Cl.
CPC ...
73718 ; 73724 ; 3612833 ; 29 2541 ;
Abstract
A capacitive differential pressure sensing device with pressure overrange protection and a method of making the same are described. The device employs a doped polysilicon diaphragm overlying a cavity in a doped single crystal silicon wafer having a port extending into the cavity from the opposite side. The cavity floor serves as an overrange protector.
Fung, Clifford. (1994). Overpressure-protected, polysilicon, capacitive differential pressure (U.S. Patent No. 5323656). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5323656
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile