The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 1994
Filed:
Aug. 16, 1991
Applicant:
Inventors:
David M Auslander, Berkeley, CA (US);
Akira Fujii, Ibaraki, JP;
Anthony C Maurer, Batavia, IL (US);
Hsuehmin Li, Berkeley, CA (US);
Chingyei Chung, Albany, CA (US);
Assignee:
The Regents of the University of California, Oakland, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 25044211 ;
Abstract
An apparatus for positioning a stage. A drive system moves the stage over a first range of motion in at least one direction. An actuator is coupled to the stage to produce a linear force to move the stage over a second range of motion. The second range of motion is less than the first range of motion. A sensor measures the stage position, and a controller controls the stage drive system and actuator.