The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 1994
Filed:
Jul. 29, 1992
Applicant:
Inventors:
Takashi Hagiwara, Miyanohigashi, JP;
Minoru Taniguchi, Miyanohigashi, JP;
Dainichiro Kinoshita, Miyanohigashi, JP;
Assignee:
Horiba, Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ; 250561 ; 250236 ; 250563 ; 356431 ;
Abstract
An apparatus for detecting particles on a substrate incorporates a calibration system to correct any change in the angle of swing of a beam scanning mirror over a period of time. A pair of optical detectors can be positioned within the optical path between the scanning mirror and the substrate to provide a fixed reference point from which positional adjustments or calibrations can be made over the life of the instrument to eliminate any drifting of the positional signals of the actually detected particles on the substrate.