The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1994
Filed:
Apr. 30, 1992
John L Bomback, Plymouth, MI (US);
Ronald C Elder, Detroit, MI (US);
Shaun L McCarthy, Ann Arbor, MI (US);
Ford Motor Company, Dearborn, MI (US);
Abstract
A capacitance transducer has a first hermetically sealed cavity adapted to deform in response to an applied force, such as pressure or acceleration, and a second hermetically sealed cavity adapted to resist deformation in response to such applied force. The cavities are formed between two doped silicon layers separated by a selectively etched electrically insulating spacer layer. Multiple medial electrically insulating cavity area spacer segments within the second cavity resist deformation thereof in response to the applied force to be measured. The capacitance transducer can be manufactured from doped silicon wafers using well developed silicon wafer processing techniques.