The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 1994

Filed:

Jul. 28, 1992
Applicant:
Inventors:

Masahiro Oono, Tokyo, JP;

Tsuyoshi Itoh, Tokyo, JP;

Katsuki Hayashi, Tokyo, JP;

Toshiyuki Kase, Tokyo, JP;

Masahiko Sasaki, Tokyo, JP;

Hiroshi Yamamoto, Tokyo, JP;

Isao Okuda, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J / ;
U.S. Cl.
CPC ...
2502015 ; 369 4423 ;
Abstract

An apparatus for measuring a wave front aberration includes a light beam splitter for dividing a parallel laser light beam made incident from a measuring object into two beamfluxes, an image rotator disposed in at least one optical path of the divided beam fluxes for rotating the wave front on the optical axis, an interference device for interfering after superposing the beam fluxes whose wave fronts are rotated relatively, an imaging lens for forming the interfered beam into an image, and an observation device for observing the imaged interference fringes.


Find Patent Forward Citations

Loading…