The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 1994
Filed:
Feb. 05, 1993
Applicant:
Inventor:
Carlos H Mastrangelo, Ann Arbor, MI (US);
Assignee:
Ford Motor Company, Dearborn, MI (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ;
U.S. Cl.
CPC ...
156644 ; 156650 ; 156657 ; 1566591 ; 156662 ; 437233 ; 437919 ; 73715 ;
Abstract
A polysilicon diaphragm is formed on top of a sacrificial layer deposited upon a semiconductor substrate, where the thickness of the layer is controllable. The sacrificial layer is removed to define a diaphragm cavity, which is sealed with a plug. Electrodes within the surfaces defining the cavity deflect in response to variations in pressure, while providing a very small and minimum parasitic capacitance.