The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 1994
Filed:
Feb. 28, 1989
Applicant:
Inventors:
Anthony Petrovich, Tewksbury, MA (US);
Marc S Weinberg, Needham, MA (US);
John R Williams, Lexington, MA (US);
Assignee:
The Charles Stark Draper Laboratories, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
73493 ; 7351 / ; 73488 ; 367165 ; 367173 ; 310348 ;
Abstract
A monolithic quartz resonator accelerometer including a monolithic quartz sensing structure with a frame, a proof mass support structure within the frame, and a resonator structure interconnecting the frame and the support structure. Further included are a proof mass fixed to the support structure, and electrodes on the resonator structure for driving the resonator at a vibration frequency which varies as a function of the acceleration of the proof mass.