The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1994
Filed:
Oct. 15, 1992
Applicant:
Inventors:
Leslie L Burns, Saratoga, CA (US);
William Barrett, San Jose, CA (US);
Robert Tsai, Los Altos, CA (US);
Assignee:
Lasa Industries, Inc., San Jose, US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250235 ; 2191218 ;
Abstract
A method and apparatus for laser beam drift compensation. A portion of the laser beam is split off and focused onto a photocell through a reticle. As the laser beam scans the reticle, the actual position of the laser beam is determined and compared with its anticipated position. Compensation is made for any deviation in the beam position in a closed-looped manner to provide accurate optical alignment of the laser beam to the workpiece.