The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1994
Filed:
Apr. 20, 1992
Applicant:
Inventors:
Assignee:
Hoechst Aktiengesellschaft, Frankfurt am Main, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ; G03F / ;
U.S. Cl.
CPC ...
430270 ; 430281 ; 430326 ; 430920 ; 430921 ; 522 50 ;
Abstract
A 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine esterified with two or three arylsulfonic acids or heteroarylsulfonic acids is useful to prepare a positive-working radiation-sensitive mixture which is distinguished by a high resolution and a high sensitivity over a wide spectral range. It also shows high thermal stability and does not form corrosive photolysis products on exposure. A radiation-sensitive recording material which is produced from these esters is suitable for producing photoresists, electronic components, printing plates or for chemical milling.