The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 1994

Filed:

Aug. 28, 1992
Applicant:
Inventors:

Naoji Yamaoka, Sayama, JP;

Manabu Tuchida, Sayama, JP;

Yukihiro Yaguchi, Sayama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356375 ; 356376 ; 382-8 ;
Abstract

An optical measuring apparatus for use in this method has a projector for radiating a slit light on a workpiece and an image sensing device for picturing an optically cross-sectional image drawn by the slit light radiated on the workpiece. An optical axis of the slit light and an optical axis of the image sensing device cross each other at an oblique angle. Setting windows are set at predetermined positions of the optically cross-sectional image on a screen of the image sensing device. A position of center of gravity of each optically cross-sectional image in each of the windows is measured. An amount of displacement in an X-axis direction of the optically cross-sectional image on the screen is measured. A rate of magnification of the optically cross-sectional image in a Y-axis direction is calculated from the amount of displacement. Setting positions of the windows in the Y-axis direction and sizes thereof in the Y-axis direction are changed depending on the rate of magnification.


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