The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1994
Filed:
Jul. 29, 1992
Applicant:
Inventors:
Minoru Taniguchi, Miyanohigashi, JP;
Masaaki Ishihara, Miyanohigashi, JP;
Takashi Hagiwara, Miyanohigashi, JP;
Assignee:
Horiba, Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ; 356400 ; 250561 ; 250563 ;
Abstract
An apparatus and method for observing the location of minute particles on a substrate and adjusting for any inclination of the substrate surface is provided. A support station can mount a substrate for movement in both the X and Y planes and in the vertical plane. A laser scanning optical device can determine the locations of minute particles. The coordinates of any inclination of support surface is determined and is used to vary the particle positions so that a subsequent examination by a microscope will be easily accomplished with an in-focus position.