The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1994
Filed:
May. 19, 1993
Stephen G Sheck, Marble Falls, TX (US);
Motorola Inc., Schaumburg, IL (US);
Abstract
An alignment key (10) in a semiconductor substrate (40) is fabricated to display high optical contrast, and to prevent the diffusion of ionic contaminants through the alignment key (10) and into underlying portions of the semiconductor substrate (40). The alignment key (10) defines an enclosed structure formed by first and second metal layers (14, 20) which are electrically coupled by a filled via (22). A dielectric layer (42) is disposed between the metal layers (14, 20). A passivation layer (16) overlies an edge portion of the upper metal layer (14), however, the central portion of the upper metal layer (14) is bare. Slots (11, 12) in the upper metal layer (14) expose a portion of the lower layer (20) through the dielectric material (42). A high contrast scan signal (24) is generated as a continuous-wave laser beam traverses across the upper metal layer (14) and the slots (11,12). The scan signal is analyzed by a computer algorithm to determine the vertical and horizontal position of a semiconductor substrate (40) having multiple alignment keys (10) of the invention.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile