The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 1994

Filed:

May. 29, 1992
Applicant:
Inventor:

John C Sardella, Highland Village, TX (US);

Assignee:

SGS-Thomson Microelectronics, Inc., Carrollton, TX (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03F / ;
U.S. Cl.
CPC ...
430313 ; 436311 ; 436318 ; 436319 ; 436329 ; 156643 ; 156660 ; 1566611 ;
Abstract

A method for patterning a reflective surface in an integrated circuit. A first photoresist layer is formed over a conductive layer in the integrated circuit. A second photoresist layer is then formed over the first photoresist layer, where the transmittance of the first photoresist layer is less than the transmittance of the second photoresist layer. The first and second photoresist layers are exposed to define a masking pattern, and portions of the first and second masking layers are then removed to form a mask which corresponds to the masking pattern. Finally, the conductive layer is patterned using the mask formed by the first and second photoresist layers.


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