The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1994
Filed:
Jun. 17, 1992
Applicant:
Inventors:
Michael Offenberg, Tuebingen, DE;
Martin Willmann, Reutlingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C03C / ;
U.S. Cl.
CPC ...
156630 ; 156633 ; 156651 ; 156657 ; 156662 ; 148D / ; 437901 ; 437921 ;
Abstract
A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.