The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1994
Filed:
May. 07, 1992
Minoru Ametani, Osaka, JP;
Nitto Denko Corporation, Osaka, JP;
Abstract
A single wafer transport mechanism takes a semiconductor wafer out of a cassette loader, and transports the wafer to a single wafer positioning mechanism for placing the wafer in position. When applying a protective adhesive tape to a surface of the wafer, the transport mechanism transports the wafer placed in position to a tape applying mechanism. When removing the protective tape from the wafer surface, the transport mechanism transports the wafer to a tape removing mechanism which removes the protective tape from the wafer surface by using a remover adhesive tape having a strong adhesion. The wafer having the protective tape applied thereto or stripped of the protective tape is transported back to a cassette by the wafer transport mechanism.