The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 1994
Filed:
Feb. 17, 1993
Masahiro Nakagawa, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A light exposure system is for exposure of a pattern on a first object to form an image thereof on a second object, which comprises an illumination optical system for illuminating the first object, a projection optical system for projecting the pattern on the first object onto the second object, a stage device for two-dimensionally moving the second object while holding the second object, a reference member mounted on the stage device, a detecting device for detecting light from the reference member, and a measuring device for carrying out a predetermined measurement, based on an output of the detecting device. In the light exposure system, the illumination optical system comprises a light source device for supplying exposure light, an off-center multiple beam producing device for producing from the exposure light from the light source device a plurality of light sources eccentric to an optical axis of the illumination optical system, and a light condensing optical system for condensing a plurality of beams from the off-center multiple beam producing device to illuminate the first object in an oblique direction. Further in the system, the detecting device is disposed at a position where the plurality of eccentric beams are formed by the off-center multiple beam producing device and on the optical axis of the illumination optical system to receive the light from the reference member through the projection optical system and the light condensing optical system.