The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 1994
Filed:
Jul. 08, 1992
Shingo Watanabe, Kanagawa, JP;
Tokyo Electron Sagami Kabushiki Kaisha, Shiroyama, JP;
Abstract
In a vertical type of heat treatment apparatus, a cover for covering an opening portion at a lower end of a reaction chamber is configured from a heat retention cylinder cover and a heat retention cylinder support plate. This cover is made so that the lower end is open and so that the upper end is a cylindrical shape with a closed end. The heat retention cylinder is disposed inside a region which is surrounded by the cover, and the heat retention cylinder is supported by the support plate, and the closed end portion of the heat retention cylinder and the support plate both have vent holes formed therein so that the inside of the heat retention cylinder is maintained at atmospheric pressure. The cover airtightly separates the heat retention cylinder from the heat treating region and so there is no contamination from the heat retention cylinder, and the heat retention cylinder is maintained at atmospheric pressure and so there is no danger of destruction of the heat retention portion.