The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 1994
Filed:
Apr. 20, 1992
Applicant:
Inventors:
Assignee:
Balzers Aktiengesellschaft, Balzers, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
21912143 ; 2191 / ; 156345 ; 156646 ; 20429834 ;
Abstract
In order to remove material from the surfaces in a vacuum chamber it is proposed to activate hydrogen gas in a plasma with the aid of a low voltage arc discharge which is supported by a hot emitting electrode in a cathode chamber. The removing method allows the cleaning of surfaces onto which subsequently safely adhering layers of a highest purity can be precipitated. The method can also be used for cleaning vacuum chambers. The small expenditures regarding apparatuses with the high rates of removal to be obtained produce a highly economical practicing of the method.