The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 1994
Filed:
Oct. 01, 1992
Takenori Morikawa, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
An alignment check pattern formed by a first insulating film; a first dummy pattern formed on a surface of said first insulating film; a second insulating film formed on a composite surface of said first insulating film and said first dummy pattern; a second dummy pattern formed on said second film, and positioned directly over said first dummy pattern in plan view; a third insulating film formed on a composite surface of said second insulating film and said second dummy pattern; a regular scale pattern formed on said third insulating film, and positioned directly over said second dummy pattern; fourth insulating film formed on a composite surface of said third insulating film and said regular scale pattern; and a vernier scale pattern formed on a surface of said fourth insulating film and positioned directly over said regular scale pattern.