The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 1994
Filed:
Feb. 22, 1993
Applicant:
Inventor:
Karl-Ulrich Stein, Unterhaching, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
385 88 ; 385 91 ; 385 92 ;
Abstract
A member of silicon, having at least two regions of single-crystal silicon having mutually different crystal orientations for anisotropic etching to produce advantageous profiles, and method for the manufacture thereof. In such a member of crystalline silicon, such as employed in silicon microtechnology, both adjustment aids for round and cylindrical members as well as adjustment aids for rectangular members can be fashioned using only the basis of anisotropic etching. The two regions can be defined by two wafers of differently oriented, single-crystal silicon that have their flat sides joined to one another.