The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 1994
Filed:
Mar. 26, 1992
Applicant:
Inventors:
Ryusuke Ushikoshi, Handa, JP;
Kazuhiro Nobori, Haguri, JP;
Yusuke Niori, Nagoya, JP;
Koichi Umemoto, Toyota, JP;
Hiromichi Kobayashi, Yokkaichi, JP;
Toshihiko Honda, Nagoya, JP;
Kenji Kawabata, Toyonaka, JP;
Assignee:
NGK Insulators, Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
219385 ; 392416 ; 219553 ; 118725 ;
Abstract
An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.