The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 1994
Filed:
Feb. 09, 1993
Applicant:
Inventors:
Tomohisa Mizuno, Yokohama, JP;
Shizuo Sawada, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
257396 ; 257306 ; 257307 ; 257532 ; 257535 ;
Abstract
According to the present invention, a lower electrode is formed on a semiconductor substrate and overgrows upward to form one electrode of a capacitor having a mushroom-shaped section. An insulation film is formed so as to at least cover the lower electrode. An upper electrode is formed so as to oppose the lower electrode and to cover at least the insulation film.