Method of manufacturing a semiconductor device, in which isolated

Abstract

A method of manufacturing a semiconductor device is set forth, in which a conductive layer (21) and a first insulating layer (22) are provided on a surface (2) of a semiconductor body (1). A conductor track (5) with an insulating top layer (6) is formed in these layers and the top layer (6) is formed in a first insulating layer (22) by means of a first etching treatment. Further, while masking with the top layer (6), the conductor track (5) is formed in the conductive layer (21) by means of a second etching treatment, after which the conductor track (5) is provided with a side edge insulation (7). The surface (2) and the conductor track (5) with its top layer (6) are covered by a second insulating layer (24), which is then subjected to a third anisotropic etching treatment until this layer (24) has been removed from the surface (2) and the top layer (6). According to the invention, the second etching treatment is at least initially carried out so that the conductive layer (21) is etched isotropically, while the top layer (6) is then practically not attacked, cavities (31) are formed under the top layer (6) near its edges (30), after which the second insulating layer (24) is deposited in a thickness such that the cavities (31) are entirely filled with insulating material. Thus, the occurrence of leakage currents and shortcircuits between the conductor track (5) and the metallization (8; 9) to be provided on the insulation layers (6, 7) are avoided.