The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 1994
Filed:
Aug. 03, 1992
Helmut Grimm, Darmstadt, DE;
Thomas Krug, Rodenbach, DE;
Andreas Meier, Pfulingen, DE;
Klemens Ruebsam, Jossgrund, DE;
Gerhard Steiniger, Ronneburg, DE;
Mika Gamo, Kasukabe, JP;
Mamoru Sekiguchi, Kawaguchi, JP;
Mitsuru Kano, Tokyo, JP;
Hiroyuki Yasujima, Tokyo, JP;
Takashi Miyamoto, Sugito, JP;
Noboru Sasaki, Sugito, JP;
Leybold Aktiengesellschaft, Hanau, DE;
Toppan Printing Co., Ltd, Tokyo, JP;
Abstract
The invention relates to a vacuum coating installation comprising a container (9) in which is disposed the material (10) to be vaporized, for example SiO. The vaporization of the material (10) herein takes place by means of an electron beam gun (11) or by means of a vaporization oven. Opposing the surface of the material to be vaporized (10) is provided a synthetic film (5) to be coated which is transported further by means of a transport arrangement (4, 6, 22 to 27). Into the space between the material (10) to be vaporized and the material (5) to be coated a microwave is irradiated from an horn antenna (13).