The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 1994
Filed:
Apr. 20, 1992
Applicant:
Inventor:
Akihiko Nakano, Nara, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
356 36 ;
Abstract
An inspecting apparatus is provided by which a cross section of a semiconductor device to be inspected can be easily obtained. The inspection apparatus includes a first microscope for specifying a portion where the inspection of a cross section is to be effected, a rotary grinder for grinding the portion specified by the first microscope, a second microscope for monitoring the portion ground by the rotary grinder, and a stage for fixing the semiconductor device movable relative to the first and second microscopes and the rotary grinder.
Quick Actions:
Nakano, Akihiko. (1994). Apparatus for inspecting a semiconductor device (U.S. Patent No. 5301002). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5301002
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile