The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 1994
Filed:
Feb. 07, 1991
G Benjamin Hocker, Minnetonka, MN (US);
David W Burns, Minneapolis, MN (US);
Akintunde I Akinwande, Bloomington, MN (US);
Robert D Horning, Burnsville, MN (US);
Amir R Mirza, Golden Valley, MN (US);
Thomas G Stratton, Roseville, MN (US);
Deidrich J Saathoff, Burnsville, MN (US);
James K Carney, Eden Prairie, MN (US);
Scott A McPherson, Eagan, MN (US);
Other;
Abstract
The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.